Hydrogen quantification in hydrogenated amorphous carbon films by infrared, Raman, and x-ray absorption near edge spectroscopies
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منابع مشابه
Electronic structure and bonding properties of Si-doped hydrogenated amorphous carbon films
This work investigates the C K-edge x-ray absorption near-edge structure (XANES), valence-band photoelectron spectroscopy (PES), and Fourier transform infrared (FTIR) spectra of Si-doped hydrogenated amorphous carbon films. The C K-edge XANES and valence-band PES spectra indicate that the sp2 /sp3 population ratio decreases as the amount of tetramethylsilane vapor precursor increases during dep...
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